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Failed
zero-D refill pattern, large topview of large area
Zero-dimensional
opto-electronic structures can also be made., similar to Quantum
Dots. In this case, we have both steep vias as quantum boxes, and
the zero-fill line patterns that can be used to make zero-D
structures. The images of the zero-D refill pattern show a failed
attempt in which residual photoresist has left lumps along the
ridges of the patterns.
The AFM images are, nonetheless, spectacular!
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