|
In
the AFM, the tip is attached to a spring in the form of a
cantilever. As the tip moves over the surface, the cantilever bends
back and forth in the z direction. A laser beam is directed onto the
cantilever and as the cantilever bends, the movement of the
reflected beam is detected by a photo diode. A feedback circuit
integrates this signal and applies a feedback voltage to the z piezo
(PZT) to exactly balance the cantilever bending. Since the probe
force is proportional to the cantilever bending, this is constant.
The image of the surface is built up as a series of scan lines, each
displaced in the y direction from the previous one. Each individual
line is a plot of the voltage applied to the z piezo as a function
of the voltage applied to the x piezo.

In
a further development at Quesant, the error signal E representing
bending of the cantilever not corrected by the feedback is scaled
and added to the Z signal to provide a mathematically correct image
(I=E+Z).

The
broadband mode allows the PID loop to be optimized for
the best tracking of the probe but the image quality is superior
because surface information is not lost due to the low-pass nature
of the PID loop.
Under best conditions, the z-axis response Z will be about 3500 Hz,
while the error response will be 25000 Hz. Under conditions where
the PID gains must be reduced to prevent oscillation in portions of
the image, the error component E will still provide the full
bandwidth, and detail in the image will not be lost, even at the
highest scan speeds.
|